The procurement of the Supply, Installation and Commissioning of a Focused Ion Beam Scanning Electron Microscope (FIB-SEM) with Gallium Ion Source

DTU requires the supply, delivery, installation, commissioning and acceptance of one (1) focused ion beam scanning electron microscope (FIB-SEM) dual-beam platform. The instrument shall serve a multi-user research environment and will be used for high-resolution surface imaging, site-specific cross-sectioning, TEM lamella preparation (including automated workflows), 3D FIB-SEM tomography, gas-assisted deposition and etching, nanoscale manipulation, and elemental microanalysis by energy-dispersive X-ray spectroscopy (EDS) and ToF-SIMS.